Part I Instrumentation – Overview
1 Metrological Scanning Probe Microscopes – Instruments for Dimensional
Nanometrology 3
Hans-Ulrich Danzebrink, Frank Pohlenz, Gaoliang Dai, and
Claudio Dal Savio
1.1 Introduction 3
1.2 High-Resolution Probing Systems 4
1.2.1 Sensor Objective with Beam Deflection Detection 5
1.2.2 Sensor Objective with Piezolever Module 7
1.2.3 Sensor Objective with Tuning Fork Module 8
1.2.4 Sensor Head for Combined Scanning Probe and Interference
Microscopy 9
1.3 Metrology Systems Based on Scanning Probe Microscopes 12
1.3.1 Scanning Force Microscopes of Type Veritekt 13
1.3.2 Metrological Large Range Scanning Force Microscope 15
1.4 Summary 18
Acknowledgments 19
References 19
2 Nanometrology at the IMGC 22
M. Bisi, E. Massa, A. Pasquini, G. B. Picotto, and M. Pisani
2.1 Introduction 22
2.2 Surface Metrology 23
2.2.1 Scanning Probe Microscopy 23
2.2.2 Optical Diffractometry 25
2.2.3 Stylus Profilometry 27
2.3 Atomic Scale Metrology 28
2.3.1 Lattice Parameter of Silicon 29
2.3.2 Combined Optical and X-Ray Interferometry (COXI) 30
2.4 Phase-Contrast Topograpy 31
2.4.1 Detection of Small Lattice Strain 31
2.4.2 Phase-Contrast Imaging 32
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