Practical aspects of atomic resolution imaging and analysis in STEM
In the scanning transmission electron microscope (STEM), the spatial resolution of experimental images and spectra is
determined by the size and stability of the electron probe. Atomic resolution, of 0.2 nm and under, is possible if all
experimental parameters in#uencing probe formation are carefully optimized. Here, the formation and alignment of the
STEM probe using electron Ronchigrams is described. Practical examples of probe formation, Z-contrast imaging and
electron energy-loss spectroscopy (EELS) are demonstrated on a Schottky "eld emission, JEOL JEM-2010F microscope.
Single crystal Si S1 1 0T images were used for resolution testing and showed that probe sizes of under 0.14 nm are
obtainable. A 36.53 &5 tilt grain boundary in nominally iron doped SrTiO3 was imaged incoherently and analyzed with
EELS, using this probe. ( 1999 Elsevier Science B.V. All rights reserved.