This support note describes nanoindentation and nanoscratching procedures with
Digital Instruments SPMs using NanoScope software. Both methods are useful for
measuring mechanical characteristics of materials on a nanometer scale using a
diamond tip mounted to a metal foil cantilever. These indentation cantilevers are
useful for indenting, wearing, scratching and also imaging sample surfaces using
TappingMode AFM. The forces involved when indenting are typically in the range
of 1—100 μN (micro-Newtons) for a standard cantilever. A variety of samples can
be tested using the same cantilever, with the same laser alignment, to obtain equal
forces during each test. Then the samples can be imaged and the relevant data
compared. Advantages of using cantilevered tips include ability to image the
surface with the diamond tip; excellent repeatability; and low noise for relative
measures of hardness and wear testing. Each probe is individually tested to
determine the tip sharpness (<25 nm tip radius), and the spring constant (± 10%
accuracy). The basic steps described below may be used as a guide for performing
nanoindentation using Digital Instruments Dimension™ Series, BioScope™ and
MultiMode™ SPMs.
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