Interfacial studies for improving the adhesion of diamond-like carbon films on steel
The adhesion of diamond-like carbon (DLC) films on steel is usually very poor. Adhesion of DLC on SKD11 steel was
improved for tribological purposes in this study by applying chromium (Cr) metal intermediate layers using magnetron
sputtering with substrate bias. DLC films were deposited by inductively coupled plasma (ICP) chemical vapor deposition.
However, the adhesion was only at medium level. Intermixing at the Cr–steel interface was further achieved by ion bombardment
and found to remarkably improve the adhesion. A reliable process was established to improve the adhesion to top level.
# 2004 Elsevier B.V. All rights reserved.