Table of contents
Preface ....................................................................................................................................................... 3
1. Types of Image Disturbances .................................................................................................................... 4
2. Image Changes Caused by Interactions Between Electron Probe and Specimen ............................... 5
2-1 Influence of accelerating voltage on image quality .......................................................................... 5
2-2 Probe current, probe diameter and image quality ............................................................................ 8
2-3 Influence of edge effect on image quality ......................................................................................... 9
2-4 Use of specimen tilt........................................................................................................................... 10
a) Dependence of image quality on tilt angle ................................................................................. 10
b) Stereo micrographs ...................................................................................................................... 10
c) Detector position and specimen direction .................................................................................. 11
2-5 Use of backscattered electron signals ............................................................................................ 12
2-6 Influence of charge-up on image quality ......................................................................................... 14
a) Charge-up and countermeasures against it ............................................................................... 14
b) Prevention of charge-up by sampling ......................................................................................... 15
2-7 Specimen damage by electron beam ............................................................................................. 16
2-8 Contamination ................................................................................................................................... 17
3. The Influence on Images, of Operational Technique, Specimen Preparation Technique,
External Disturbances, Etc ....................................................................................................................... 18
3-1 Working distance and objective aperture ........................................................................................ 18
a) Influence of working distance on images.................................................................................... 18
b) Influence of objective aperture diameter on images .................................................................. 18
3-2 Influence of astigmatism................................................................................................................... 20
3-3 Optimum contrast and brightness of micrographs ......................................................................... 22
3-4 Exposure time for X-ray images........................................................................................................ 23
3-5 Influence of external disturbances on images ................................................................................ 24
3-6 Deformation and impurity precipitation during specimen preparation process ........................... 25
3-7 Image distortion and its cause ......................................................................................................... 26
3-8 Coating .............................................................................................................................................. 28
a) Sputtering device .......................................................................................................................... 28
b) Vacuum evaporator ...................................................................................................................... 28
4. Disturbances Caused by Intrumental Defects ........................................................................................ 30
4-1 Insufficient filament heating .............................................................................................................. 30
4-2 In correct alignment and centering of objective aperture .............................................................. 31
4-3 10 kV discharge of detector ............................................................................................................. 32
4-4 Burnt or dusty CRT ........................................................................................................................... 33
Technical terms ................................................................................................................................................ 34
Closing words/References .............................................................................................................................. 35
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