S-4800開關機程序

仪器资料 · 发表于 2018-6-12 16:47:34

S-4800開關機程序

1.) HV→ OFF,GO TO EXC後取出樣品.電腦關機後DISPLAY    POWER→ OFF; Water Chiller→ OFF.
2.) COLUMN PANEL 上 STAGE Power Switch→ OFF
3.) COLUMN PANEL 上 EVAC Power Switch→ OFF. (等30  分鐘讓APT Heater 回溫後再等5分鐘直到TMP POWER LAMP→ OFF(指示器出現POFF).
4.) COLUMN PANEL 上之IP1、IP2、IP3  Switch→ OFF..
5.) DISPLAY右後方電源控制面板上IP, EVAC, DISPLAY,    OUTER BAKE之Breaker→ OFF.再將MAIN POWER BREAKER → OFF.
6.)  關掉UPS(不斷電系統). (含後面 BREAKER),.

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